Inventor

TOBASHI SHYUJI

JP2 patents

Patents

2 patents

US6461428B2Oct 8, 2002

Method and apparatus for controlling rise and fall of temperature in semiconductor substrates

TOSHIBA CERAMICS CO6 citations60

US6485573B2Nov 26, 2002

Apparatus for reduced-pressure epitaxial growth and method of controlling the apparatus

TOSHIBA CERAMICS CO0 citations39