Inventor
FERNANDES MARK G
US3 patents
Patents
3 patentsUS5310626AMay 10, 1994
Method for forming a patterned layer using dielectric materials as a light-sensitive material
MOTOROLA INC52 citations90
US6136678AOct 24, 2000
Method of processing a conductive layer and forming a semiconductor device
MOTOROLA INC18 citations80
US5317185AMay 31, 1994
Semiconductor device having structures to reduce stress notching effects in conductive lines and method for making the same
MOTOROLA INC14 citations71