Inventor
CHEN ING-SHIN
US12 patents
⚠️ This page may combine multiple inventors who share the name “CHEN ING-SHIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANCED TECH MATERIALS
10 patentsUS7475588B2Jan 13, 2009
Apparatus and process for sensing fluoro species in semiconductor processing systems
ADVANCED TECH MATERIALS474 citations98
US7296460B2Nov 20, 2007
Apparatus and process for sensing fluoro species in semiconductor processing systems
ADVANCED TECH MATERIALS481 citations98
US7080545B2Jul 25, 2006
Apparatus and process for sensing fluoro species in semiconductor processing systems
ADVANCED TECH MATERIALS495 citations98
US7296458B2Nov 20, 2007
Nickel-coated free-standing silicon carbide structure for sensing fluoro or halogen species in semiconductor processing systems, and processes of making and using same
ADVANCED TECH MATERIALS21 citations92
US7228724B2Jun 12, 2007
Apparatus and process for sensing target gas species in semiconductor processing systems
ADVANCED TECH MATERIALS19 citations92
US6900498B2May 31, 2005
Barrier structures for integration of high K oxides with Cu and Al electrodes
ADVANCED TECH MATERIALS36 citations92
US6312816B1Nov 6, 2001
A-site- and/or B-site-modified PbZrTiO3 materials and (Pb, Sr, Ca, Ba, Mg) (Zr, Ti, Nb, Ta)O3 films having utility in ferroelectric random access memories and high performance thin film microactuators
ADVANCED TECH MATERIALS23 citations92
US7193187B2Mar 20, 2007
Feedback control system and method for maintaining constant resistance operation of electrically heated elements
ADVANCED TECH MATERIALS23 citations88
US7655887B2Feb 2, 2010
Feedback control system and method for maintaining constant resistance operation of electrically heated elements
ADVANCED TECH MATERIALS6 citations73
US6692569B2Feb 17, 2004
A-site-and/or b-site-modified pbzrtio3 materials and (pb, sr, ca, ba, mg) (zr, ti,nb, ta)o3 films having utility in ferroelectric random access memories and high performance thin film microactuators
ADVANCED TECH MATERIALS11 citations73