Inventor
IKEDA KAZUHITO
JP13 patents
⚠️ This page may combine multiple inventors who share the name “IKEDA KAZUHITO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KOKUSAI ELECTRIC CO LTD
5 patentsUS5788447AAug 4, 1998
Substrate processing apparatus
KOKUSAI ELECTRIC CO LTD246 citations97
US6066210AMay 23, 2000
Substrate processing apparatus with a processing chamber, transfer chamber, intermediate holding chamber, and an atmospheric pressure section
KOKUSAI ELECTRIC CO LTD93 citations96
US6143083ANov 7, 2000
Substrate transferring mechanism
KOKUSAI ELECTRIC CO LTD81 citations95
US6190104B1Feb 20, 2001
Treatment object conveyor apparatus, semiconductor manufacturing apparatus, and treatment object treatment method
KOKUSAI ELECTRIC CO LTD28 citations92
US5632820AMay 27, 1997
Thermal treatment furnace in a system for manufacturing semiconductors
KOKUSAI ELECTRIC CO LTD52 citations92