Inventor

ROHDE MATHIAS

DE2 patents

⚠️ This page may combine multiple inventors who share the name “ROHDE MATHIAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LEICA MICROSYS LITHOGRAPHY LTD

1 patent

US7491946B2Feb 17, 2009

Electrostatic deflection system for corpuscular radiation

LEICA MICROSYS LITHOGRAPHY LTD0 citations48

KALKOWSKI GERHARD

1 patent

US9815262B2Nov 14, 2017

Method for joining substrates

KALKOWSKI GERHARD1 citations40