Inventor
SONDERMAN THOMAS
US12 patents
Patents
12 patentsUS6387823B1May 14, 2002
Method and apparatus for controlling deposition process using residual gas analysis
ADVANCED MICRO DEVICES INC290 citations99
US6470230B1Oct 22, 2002
Supervisory method for determining optimal process targets based on product performance in microelectronic fabrication
ADVANCED MICRO DEVICES INC119 citations98
US6546508B1Apr 8, 2003
Method and apparatus for fault detection of a processing tool in an advanced process control (APC) framework
ADVANCED MICRO DEVICES INC61 citations96
US6465263B1Oct 15, 2002
Method and apparatus for implementing corrected species by monitoring specific state parameters
ADVANCED MICRO DEVICES INC69 citations96
US6284622B1Sep 4, 2001
Method for filling trenches
ADVANCED MICRO DEVICES INC61 citations96
US6524774B1Feb 25, 2003
Method of controlling photoresist thickness based upon photoresist viscosity
ADVANCED MICRO DEVICES INC23 citations92
US6511898B1Jan 28, 2003
Method for controlling deposition parameters based on polysilicon grain size feedback
ADVANCED MICRO DEVICES INC25 citations92
US6454899B1Sep 24, 2002
Apparatus for filling trenches
ADVANCED MICRO DEVICES INC33 citations92
US7324865B1Jan 29, 2008
Run-to-run control method for automated control of metal deposition processes
ADVANCED MICRO DEVICES INC28 citations90
US6650957B1Nov 18, 2003
Method and apparatus for run-to-run control of deposition process
ADVANCED MICRO DEVICES INC19 citations84
US6850322B2Feb 1, 2005
Method and apparatus for controlling wafer thickness uniformity in a multi-zone vertical furnace
ADVANCED MICRO DEVICES INC9 citations73
US6258681B1Jul 10, 2001
Use of a rapid thermal anneal process to control drive current
ADVANCED MICRO DEVICES INC5 citations63