Inventor
KOVALERCHIK MICHAEL
US5 patents
Patents
5 patentsUS6781138B2Aug 24, 2004
Positioning stage with stationary actuators
NIKON CORP20 citations91
US6753534B2Jun 22, 2004
Positioning stage with stationary and movable magnet tracks
NIKON CORP19 citations82
US6515381B1Feb 4, 2003
Cantilever stage
NIKON CORP7 citations72
US6903346B2Jun 7, 2005
Stage assembly having a follower assembly
NIKON CORP6 citations62
US6570644B2May 27, 2003
Connection assembly of wafer stage chamber
NIKON CORP6 citations61