Inventor
MATSUMURA ATSUKI
JP11 patents
⚠️ This page may combine multiple inventors who share the name “MATSUMURA ATSUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIPPON STEEL CORP
9 patentsUS7204887B2Apr 17, 2007
Wafer holding, wafer support member, wafer boat and heat treatment furnace
NIPPON STEEL CORP581 citations98
US7067402B2Jun 27, 2006
Production method for SIMOX substrate and SIMOX substrate
NIPPON STEEL CORP21 citations90
US6617034B1Sep 9, 2003
SOI substrate and method for production thereof
NIPPON STEEL CORP16 citations82
US7084459B2Aug 1, 2006
SOI substrate
NIPPON STEEL CORP10 citations72
US5710437AJan 20, 1998
Radiation detecting device using superconducting tunnel junction and method of fabricating the same
NIPPON STEEL CORP16 citations72
US5753935AMay 19, 1998
Superconductive tunnel junction array radiation detector
NIPPON STEEL CORP16 citations71
US5321276AJun 14, 1994
Radiation sensing device and Josephson device
NIPPON STEEL CORP17 citations70
US6767801B2Jul 27, 2004
Simox substrate and method for production thereof
NIPPON STEEL CORP6 citations62
US6740565B2May 25, 2004
Process for fabrication of a SIMOX substrate
NIPPON STEEL CORP2 citations62