Inventor
MARDIAN ALLEN P
US36 patents
Patents
36 patentsUS7387685B2Jun 17, 2008
Apparatus and method for depositing materials onto microelectronic workpieces
MICRON TECHNOLOGY INC502 citations98
US6838114B2Jan 4, 2005
Methods for controlling gas pulsing in processes for depositing materials onto micro-device workpieces
MICRON TECHNOLOGY INC77 citations98
US6787463B2Sep 7, 2004
Chemical vapor deposition methods, and atomic layer deposition method
MICRON TECHNOLOGY INC77 citations98
US6821347B2Nov 23, 2004
Apparatus and method for depositing materials onto microelectronic workpieces
MICRON TECHNOLOGY INC94 citations97
US6814813B2Nov 9, 2004
Chemical vapor deposition apparatus
MICRON TECHNOLOGY INC45 citations96
US6797337B2Sep 28, 2004
Method for delivering precursors
MICRON TECHNOLOGY INC60 citations96
US6743736B2Jun 1, 2004
Reactive gaseous deposition precursor feed apparatus
MICRON TECHNOLOGY INC54 citations96
US6412437B1Jul 2, 2002
Plasma enhanced chemical vapor deposition reactor and plasma enhanced chemical vapor deposition process
MICRON TECHNOLOGY INC54 citations96
US7581511B2Sep 1, 2009
Apparatus and methods for manufacturing microfeatures on workpieces using plasma vapor processes
MICRON TECHNOLOGY INC259 citations94
US7311947B2Dec 25, 2007
Laser assisted material deposition
MICRON TECHNOLOGY INC19 citations93
US7185601B2Mar 6, 2007
Chemically sensitive warning apparatus and method
MICRON TECHNOLOGY INC27 citations93
US6858264B2Feb 22, 2005
Chemical vapor deposition methods
MICRON TECHNOLOGY INC28 citations93
US6620253B1Sep 16, 2003
Engagement mechanism for semiconductor substrate deposition process kit hardware
MICRON TECHNOLOGY INC20 citations93
US6613587B1Sep 2, 2003
Method of replacing at least a portion of a semiconductor substrate deposition chamber liner
MICRON TECHNOLOGY INC33 citations93
US6468925B2Oct 22, 2002
Plasma enhanced chemical vapor deposition process
MICRON TECHNOLOGY INC44 citations93
US7229666B2Jun 12, 2007
Chemical vapor deposition method
MICRON TECHNOLOGY INC34 citations92
US7044997B2May 16, 2006
Process byproduct trap, methods of use, and system including same
MICRON TECHNOLOGY INC16 citations92
US6800172B2Oct 5, 2004
Interfacial structure for semiconductor substrate processing chambers and substrate transfer chambers and for semiconductor substrate processing chambers and accessory attachments, and semiconductor substrate processor
MICRON TECHNOLOGY INC30 citations91
US7468104B2Dec 23, 2008
Chemical vapor deposition apparatus and deposition method
MICRON TECHNOLOGY INC15 citations83
US7270715B2Sep 18, 2007
Chemical vapor deposition apparatus
MICRON TECHNOLOGY INC9 citations74
US7234412B2Jun 26, 2007
Semiconductor substrate deposition processor chamber liner apparatus
MICRON TECHNOLOGY INC9 citations74
US7118783B2Oct 10, 2006
Methods and apparatus for vapor processing of micro-device workpieces
MICRON TECHNOLOGY INC10 citations74
US7114404B2Oct 3, 2006
System and method for detecting flow in a mass flow controller
MICRON TECHNOLOGY INC7 citations74
US6800134B2Oct 5, 2004
Chemical vapor deposition methods and atomic layer deposition methods
MICRON TECHNOLOGY INC6 citations74
US6787373B2Sep 7, 2004
Method of replacing at least a portion of semiconductor substrate deposition process kit hardware, and method of depositing materials over a plurality of semiconductor substrates
MICRON TECHNOLOGY INC7 citations74
US6627465B2Sep 30, 2003
System and method for detecting flow in a mass flow controller
MICRON TECHNOLOGY INC9 citations74
US7481887B2Jan 27, 2009
Apparatus for controlling gas pulsing in processes for depositing materials onto micro-device workpieces
MICRON TECHNOLOGY INC5 citations63
US7329292B2Feb 12, 2008
Process byproduct trap and system including same
MICRON TECHNOLOGY INC3 citations63
US7255128B2Aug 14, 2007
System and method for detecting flow in a mass flow controller
MICRON TECHNOLOGY INC2 citations63
US7000636B2Feb 21, 2006
Valve assemblies for use with a reactive precursor in semiconductor processing
MICRON TECHNOLOGY INC3 citations63
US6935372B2Aug 30, 2005
Semiconductor processing reactive precursor valve assembly
MICRON TECHNOLOGY INC1 citations63
US6936547B2Aug 30, 2005
Gas delivery system for deposition processes, and methods of using same
MICRON TECHNOLOGY INC5 citations63
US7114669B2Oct 3, 2006
Methods of operating a liquid vaporizer
MICRON TECHNOLOGY INC2 citations62
US6997403B2Feb 14, 2006
Liquid vaporizer with positive liquid shut-off
MICRON TECHNOLOGY INC3 citations62
US7192487B2Mar 20, 2007
Semiconductor substrate processing chamber and accessory attachment interfacial structure
MICRON TECHNOLOGY INC3 citations61
US7431225B2Oct 7, 2008
Methods of operating a liquid vaporizer
MICRON TECHNOLOGY INC0 citations51