Inventor
KARLSSON OLOV
US40 patents
⚠️ This page may combine multiple inventors who share the name “KARLSSON OLOV”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANCED MICRO DEVICES INC
22 patentsUS6528858B1Mar 4, 2003
MOSFETs with differing gate dielectrics and method of formation
ADVANCED MICRO DEVICES INC162 citations99
US6037671AMar 14, 2000
Stepper alignment mark structure for maintaining alignment integrity
ADVANCED MICRO DEVICES INC107 citations98
US6171962B1Jan 9, 2001
Shallow trench isolation formation without planarization mask
ADVANCED MICRO DEVICES INC68 citations96
US5930645AJul 27, 1999
Shallow trench isolation formation with reduced polish stop thickness
ADVANCED MICRO DEVICES INC87 citations96
US6660578B1Dec 9, 2003
High-K dielectric having barrier layer for P-doped devices and method of fabrication
ADVANCED MICRO DEVICES INC23 citations93
US6657267B1Dec 2, 2003
Semiconductor device and fabrication technique using a high-K liner for spacer etch stop
ADVANCED MICRO DEVICES INC41 citations93
US6599810B1Jul 29, 2003
Shallow trench isolation formation with ion implantation
ADVANCED MICRO DEVICES INC29 citations93
US6143624ANov 7, 2000
Shallow trench isolation formation with spacer-assisted ion implantation
ADVANCED MICRO DEVICES INC42 citations93
US6130467AOct 10, 2000
Shallow trench isolation with spacers for improved gate oxide quality
ADVANCED MICRO DEVICES INC23 citations93
US6124183ASep 26, 2000
Shallow trench isolation formation with simplified reverse planarization mask
ADVANCED MICRO DEVICES INC25 citations93
US6121123ASep 19, 2000
Gate pattern formation using a BARC as a hardmask
ADVANCED MICRO DEVICES INC45 citations93
US6074927AJun 13, 2000
Shallow trench isolation formation with trench wall spacer
ADVANCED MICRO DEVICES INC37 citations93
US6239031B1May 29, 2001
Stepper alignment mark structure for maintaining alignment integrity
ADVANCED MICRO DEVICES INC39 citations91
US5879975AMar 9, 1999
Heat treating nitrogen implanted gate electrode layer for improved gate electrode etch profile
ADVANCED MICRO DEVICES INC33 citations91
US6306710B1Oct 23, 2001
Fabrication of a gate structures having a longer length toward the top for formation of a rectangular shaped spacer
ADVANCED MICRO DEVICES INC16 citations84
US5970363AOct 19, 1999
Shallow trench isolation formation with improved trench edge oxide
ADVANCED MICRO DEVICES INC19 citations84
US5970362AOct 19, 1999
Simplified shallow trench isolation formation with no polish stop
ADVANCED MICRO DEVICES INC17 citations84
US6380047B1Apr 30, 2002
Shallow trench isolation formation with two source/drain masks and simplified planarization mask
ADVANCED MICRO DEVICES INC9 citations74
US6894355B1May 17, 2005
Semiconductor device with silicide source/drain and high-K dielectric
ADVANCED MICRO DEVICES INC6 citations63
US6162699ADec 19, 2000
Method for generating limited isolation trench width structures and a device having a narrow isolation trench surrounding its periphery
ADVANCED MICRO DEVICES INC2 citations63
US6090712AJul 18, 2000
Shallow trench isolation formation with no polish stop
ADVANCED MICRO DEVICES INC6 citations60
US6090713AJul 18, 2000
Shallow trench isolation formation with simplified reverse planarization mask
ADVANCED MICRO DEVICES INC5 citations60
INTERMOLECULAR INC
6 patentsUS8853081B2Oct 7, 2014
High dose ion-implanted photoresist removal using organic solvent and transition metal mixtures
INTERMOLECULAR INC3 citations60
US9399753B2Jul 26, 2016
Aqua regia and hydrogen peroxide HCL combination to remove Ni and NiPt residues
INTERMOLECULAR INC0 citations51
US8946015B2Feb 3, 2015
Aqua regia and hydrogen peroxide HCI combination to remove Ni and NiPt residues
INTERMOLECULAR INC0 citations51
US8809140B2Aug 19, 2014
Aqua regia and hydrogen peroxide HCl combination to remove Ni and NiPt residues
INTERMOLECULAR INC0 citations51
US8859431B2Oct 14, 2014
Process to remove Ni and Pt residues for NiPtSi application using chlorine gas
INTERMOLECULAR INC0 citations50
US9059156B2Jun 16, 2015
Method of forming an erbium silicide metal gate stack FinFET device via a physical vapor deposition nanolaminate approach
INTERMOLECULAR INC0 citations41
DUONG ANH
5 patentsUS8518765B1Aug 27, 2013
Aqua regia and hydrogen peroxide HCl combination to remove Ni and NiPt residues
DUONG ANH5 citations82
US8513117B2Aug 20, 2013
Process to remove Ni and Pt residues for NiPtSi applications
DUONG ANH2 citations60
US8697573B2Apr 15, 2014
Process to remove Ni and Pt residues for NiPtSi applications using aqua regia with microwave assisted heating
DUONG ANH0 citations51
US8466058B2Jun 18, 2013
Process to remove Ni and Pt residues for NiPtSi applications using chlorine gas
DUONG ANH0 citations50
US8784572B2Jul 22, 2014
Method for cleaning platinum residues on a semiconductor substrate
DUONG ANH0 citations49
GLOBALFOUNDRIES INC
3 patentsUS9105497B2Aug 11, 2015
Methods of forming gate structures for transistor devices for CMOS applications
GLOBALFOUNDRIES INC19 citations91
US9362283B2Jun 7, 2016
Gate structures for transistor devices for CMOS applications and products
GLOBALFOUNDRIES INC9 citations82
US9196475B2Nov 24, 2015
Methods for fabricating integrated circuits including fluorine incorporation
GLOBALFOUNDRIES INC4 citations71
JOSHI AMOL
2 patentsUS8735302B2May 27, 2014
High productivity combinatorial oxide terracing and PVD/ALD metal deposition combined with lithography for gate work function extraction
JOSHI AMOL4 citations70
US8854067B2Oct 7, 2014
Circular transmission line methods compatible with combinatorial processing of semiconductors
JOSHI AMOL1 citations48