Inventor
CHIANG KANG-LIE
US15 patents
⚠️ This page may combine multiple inventors who share the name “CHIANG KANG-LIE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
13 patentsUS6894245B2May 17, 2005
Merie plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression
APPLIED MATERIALS INC108 citations99
US7030335B2Apr 18, 2006
Plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression
APPLIED MATERIALS INC72 citations98
US6900596B2May 31, 2005
Capacitively coupled plasma reactor with uniform radial distribution of plasma
APPLIED MATERIALS INC224 citations98
US6586886B1Jul 1, 2003
Gas distribution plate electrode for a plasma reactor
APPLIED MATERIALS INC115 citations98
US7132618B2Nov 7, 2006
MERIE plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression
APPLIED MATERIALS INC43 citations96
US6921727B2Jul 26, 2005
Method for modifying dielectric characteristics of dielectric layers
APPLIED MATERIALS INC61 citations94
US6677712B2Jan 13, 2004
Gas distribution plate electrode for a plasma receptor
APPLIED MATERIALS INC22 citations92
US6368517B1Apr 9, 2002
Method for preventing corrosion of a dielectric material
APPLIED MATERIALS INC41 citations92
US6323132B1Nov 27, 2001
Etching methods for anisotropic platinum profile
APPLIED MATERIALS INC36 citations92
US7186943B2Mar 6, 2007
MERIE plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression
APPLIED MATERIALS INC12 citations84
US10770321B2Sep 8, 2020
Process kit erosion and service life prediction
APPLIED MATERIALS INC4 citations70
US10177018B2Jan 8, 2019
Process kit erosion and service life prediction
APPLIED MATERIALS INC4 citations70
US7981812B2Jul 19, 2011
Methods for forming ultra thin structures on a substrate
APPLIED MATERIALS INC4 citations61