Inventor
HAGEN ROBERT B
US7 patents
Patents
7 patentsUS6894245B2May 17, 2005
Merie plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression
APPLIED MATERIALS INC108 citations99
US7030335B2Apr 18, 2006
Plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression
APPLIED MATERIALS INC72 citations98
US6586886B1Jul 1, 2003
Gas distribution plate electrode for a plasma reactor
APPLIED MATERIALS INC115 citations98
US7132618B2Nov 7, 2006
MERIE plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression
APPLIED MATERIALS INC43 citations96
US6677712B2Jan 13, 2004
Gas distribution plate electrode for a plasma receptor
APPLIED MATERIALS INC22 citations92
US6667577B2Dec 23, 2003
Plasma reactor with spoke antenna having a VHF mode with the spokes in phase
APPLIED MATERIALS INC28 citations90
US7186943B2Mar 6, 2007
MERIE plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression
APPLIED MATERIALS INC12 citations84