Inventor
BOTTEMA BRIAN E
US8 patents
Patents
8 patentsUS7179151B1Feb 20, 2007
Polishing pad, a polishing apparatus, and a process for using the polishing pad
FREESCALE SEMICONDUCTOR INC25 citations90
US6887138B2May 3, 2005
Chemical mechanical polish (CMP) conditioning-disk holder
FREESCALE SEMICONDUCTOR INC30 citations87
US7534162B2May 19, 2009
Grooved platen with channels or pathway to ambient air
FREESCALE SEMICONDUCTOR INC13 citations81
US7074118B1Jul 11, 2006
Polishing carrier head with a modified pressure profile
FREESCALE SEMICONDUCTOR INC12 citations81
US6905392B2Jun 14, 2005
Polishing system having a carrier head with substrate presence sensing
FREESCALE SEMICONDUCTOR INC14 citations76
US7520797B2Apr 21, 2009
Platen endpoint window with pressure relief
FREESCALE SEMICONDUCTOR INC5 citations60
US7497763B2Mar 3, 2009
Polishing pad, a polishing apparatus, and a process for using the polishing pad
FREESCALE SEMICONDUCTOR INC3 citations60
US7892070B2Feb 22, 2011
Process of using a polishing apparatus including a platen window and a polishing pad
FREESCALE SEMICONDUCTOR INC1 citations49