Inventor

CLINE KEVEN A

US2 patents

Patents

2 patents

US7074118B1Jul 11, 2006

Polishing carrier head with a modified pressure profile

FREESCALE SEMICONDUCTOR INC12 citations81

US6905392B2Jun 14, 2005

Polishing system having a carrier head with substrate presence sensing

FREESCALE SEMICONDUCTOR INC14 citations76