Inventor
REDER STEVEN E
US18 patents
⚠️ This page may combine multiple inventors who share the name “REDER STEVEN E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LSI LOGIC CORP
14 patentsUS6837967B1Jan 4, 2005
Method and apparatus for cleaning deposited films from the edge of a wafer
LSI LOGIC CORP107 citations96
US7332062B1Feb 19, 2008
Electroplating tool for semiconductor manufacture having electric field control
LSI LOGIC CORP23 citations92
US6982206B1Jan 3, 2006
Mechanism for improving the structural integrity of low-k films
LSI LOGIC CORP20 citations92
US6739953B1May 25, 2004
Mechanical stress free processing method
LSI LOGIC CORP37 citations92
US6649537B1Nov 18, 2003
Intermittent pulsed oxidation process
LSI LOGIC CORP16 citations83
US6328347B1Dec 11, 2001
Uniform axial loading ground glass joint clamp
LSI LOGIC CORP20 citations81
US6971944B2Dec 6, 2005
Method and control system for improving CMP process by detecting and reacting to harmonic oscillation
LSI LOGIC CORP3 citations62
US6574525B1Jun 3, 2003
In situ measurement
LSI LOGIC CORP3 citations62
US7314527B1Jan 1, 2008
Reactor system
LSI LOGIC CORP3 citations58
US6635116B1Oct 21, 2003
Residual oxygen reduction system
LSI LOGIC CORP5 citations55
US7183787B2Feb 27, 2007
Contact resistance device for improved process control
LSI LOGIC CORP0 citations52
US6927177B2Aug 9, 2005
Chemical mechanical electropolishing system
LSI LOGIC CORP0 citations52
US6743701B1Jun 1, 2004
Method for the formation of active area utilizing reverse trench isolation
LSI LOGIC CORP0 citations51
US7067048B2Jun 27, 2006
Method to improve the control of electro-polishing by use of a plating electrode an electrolyte bath
LSI LOGIC CORP0 citations42