Inventor

KUNESH ROBERT F

US4 patents

Patents

4 patents

US5698040ADec 16, 1997

Method for rotational wafer cleaning in solution

TEXAS INSTRUMENTS INC45 citations94

US5520205AMay 28, 1996

Apparatus for wafer cleaning with rotation

TEXAS INSTRUMENTS INC79 citations94

US6979647B2Dec 27, 2005

Method for chemical etch control of noble metals in the presence of less noble metals

TEXAS INSTRUMENTS INC54 citations93

US5698038ADec 16, 1997

Method for wafer carrier cleaning

TEXAS INSTRUMENTS INC31 citations91