Inventor
ANDREWS DANA
US3 patents
Patents
3 patentsUS5228501AJul 20, 1993
Physical vapor deposition clamping mechanism and heater/cooler
APPLIED MATERIALS INC357 citations97
US5484011AJan 16, 1996
Method of heating and cooling a wafer during semiconductor processing
APPLIED MATERIALS INC52 citations91
US4882129ANov 21, 1989
Ozone generator cell
APPLIED MATERIALS INC18 citations72