Inventor

KOH WON-YONG

KR10 patents

⚠️ This page may combine multiple inventors who share the name “KOH WON-YONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KOREA RES INST CHEM TECH

3 patents

US5922405AJul 13, 1999

Process for the preparation of aluminum oxide film using dialkylaluminum alkoxide

KOREA RES INST CHEM TECH14 citations72

US5998644ADec 7, 1999

Volatile organometallic compound containing a divalent metal and a group 13 metal, process for preparing same, and process for preparing a heterometallic oxide film using same

KOREA RES INST CHEM TECH6 citations70

US6409830B1Jun 25, 2002

Process for preparing a limo2 type heterometallic oxide film

KOREA RES INST CHEM TECH2 citations61

ASM GENITECH KOREA LTD

2 patents

US7141278B2Nov 28, 2006

Thin film forming method

ASM GENITECH KOREA LTD122 citations97

US7485349B2Feb 3, 2009

Thin film forming method

ASM GENITECH KOREA LTD17 citations91

GENITECH INC

1 patent

US6720262B2Apr 13, 2004

Method of forming copper interconnections and thin films using chemical vapor deposition with catalyst

GENITECH INC335 citations98

GENITECH CO LTD

1 patent

US6426117B1Jul 30, 2002

Method for forming a three-component nitride film containing metal and silicon

GENITECH CO LTD14 citations82

KOREA RESEARCH INST OF TECHNOL

1 patent

US6063951AMay 16, 2000

Volatile magnesium alkylaluminum alkoxide and deposition of magnesium aluminate film using same

KOREA RESEARCH INST OF TECHNOL4 citations59

UP CHEMICAL CO LTD

1 patent

US10290493B2May 14, 2019

Method for manufacturing silicon-containing thin film

UP CHEMICAL CO LTD0 citations51

KOREA INST SCI & TECH

1 patent

US6156916ADec 5, 2000

Volatile organometallic compound containing a divalent metal and a group 13 metal, process for preparing same, and process for preparing a heterometallic oxide film using same

KOREA INST SCI & TECH0 citations49