Inventor
NISHIMOTO SHINYA
JP17 patents
⚠️ This page may combine multiple inventors who share the name “NISHIMOTO SHINYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
9 patentsUS6837966B2Jan 4, 2005
Method and apparatus for an improved baffle plate in a plasma processing system
TOKYO ELECTRON LTD84 citations98
US7163585B2Jan 16, 2007
Method and apparatus for an improved optical window deposition shield in a plasma processing system
TOKYO ELECTRON LTD56 citations96
US6798519B2Sep 28, 2004
Method and apparatus for an improved optical window deposition shield in a plasma processing system
TOKYO ELECTRON LTD44 citations96
US7811428B2Oct 12, 2010
Method and apparatus for an improved optical window deposition shield in a plasma processing system
TOKYO ELECTRON LTD14 citations92
US7282112B2Oct 16, 2007
Method and apparatus for an improved baffle plate in a plasma processing system
TOKYO ELECTRON LTD18 citations92
US7147749B2Dec 12, 2006
Method and apparatus for an improved upper electrode plate with deposition shield in a plasma processing system
TOKYO ELECTRON LTD42 citations92
US7663860B2Feb 16, 2010
Electrostatic chuck
TOKYO ELECTRON LTD11 citations84
US7566379B2Jul 28, 2009
Method and apparatus for an improved upper electrode plate with deposition shield in a plasma processing system
TOKYO ELECTRON LTD5 citations63
US11427909B2Aug 30, 2022
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations51
NISHIMOTO SHINYA
6 patentsUS8968512B2Mar 3, 2015
Temperature adjusting mechanism and semiconductor manufacturing apparatus using temperature adjusting mechanism
NISHIMOTO SHINYA9 citations83
US8057600B2Nov 15, 2011
Method and apparatus for an improved baffle plate in a plasma processing system
NISHIMOTO SHINYA12 citations83
US8485127B2Jul 16, 2013
Processing apparatus
NISHIMOTO SHINYA8 citations81
US8242405B2Aug 14, 2012
Microwave plasma processing apparatus and method for producing cooling jacket
NISHIMOTO SHINYA2 citations61
US8171880B2May 8, 2012
Microwave plasma processing apparatus and method of supplying microwaves using the apparatus
NISHIMOTO SHINYA2 citations61
US8327795B2Dec 11, 2012
Microwave plasma processing apparatus and method of supplying microwaves using the apparatus
NISHIMOTO SHINYA0 citations40