Inventor
ROBERTS RICK J
US17 patents
⚠️ This page may combine multiple inventors who share the name “ROBERTS RICK J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
12 patentsUS7925377B2Apr 12, 2011
Cluster tool architecture for processing a substrate
APPLIED MATERIALS INC45 citations97
US7743728B2Jun 29, 2010
Cluster tool architecture for processing a substrate
APPLIED MATERIALS INC36 citations96
US7694647B2Apr 13, 2010
Cluster tool architecture for processing a substrate
APPLIED MATERIALS INC42 citations96
US6936551B2Aug 30, 2005
Methods and apparatus for E-beam treatment used to fabricate integrated circuit devices
APPLIED MATERIALS INC52 citations96
US6693050B1Feb 17, 2004
Gapfill process using a combination of spin-on-glass deposition and chemical vapor deposition techniques
APPLIED MATERIALS INC56 citations96
US7256139B2Aug 14, 2007
Methods and apparatus for e-beam treatment used to fabricate integrated circuit devices
APPLIED MATERIALS INC46 citations94
US7166524B2Jan 23, 2007
Method for ion implanting insulator material to reduce dielectric constant
APPLIED MATERIALS INC46 citations92
US7431585B2Oct 7, 2008
Apparatus and method for heating substrates
APPLIED MATERIALS INC14 citations83
US7381052B2Jun 3, 2008
Apparatus and method for heating substrates
APPLIED MATERIALS INC14 citations83
US6992024B2Jan 31, 2006
Gapfill process using a combination of spin-on-glass deposition and chemical vapor deposition techniques
APPLIED MATERIALS INC7 citations74
US6878644B2Apr 12, 2005
Multistep cure technique for spin-on-glass films
APPLIED MATERIALS INC9 citations71
US6895776B2May 24, 2005
Anti-stratification-solution delivery system for spin-on dielectrics
APPLIED MATERIALS INC1 citations52
ISHIKAWA TETSUYA
4 patentsUS8550031B2Oct 8, 2013
Cluster tool architecture for processing a substrate
ISHIKAWA TETSUYA13 citations92
US8215262B2Jul 10, 2012
Cluster tool architecture for processing a substrate
ISHIKAWA TETSUYA15 citations92
US8181596B2May 22, 2012
Cluster tool architecture for processing a substrate
ISHIKAWA TETSUYA15 citations92
US8146530B2Apr 3, 2012
Cluster tool architecture for processing a substrate
ISHIKAWA TETSUYA22 citations92