Inventor
SHINMA KENJI
JP9 patents
Patents
9 patentsUS7268322B2Sep 11, 2007
Semiconductor heating apparatus
SUMITOMO ELECTRIC INDUSTRIES30 citations92
US7361230B2Apr 22, 2008
Substrate processing apparatus
SUMITOMO ELECTRIC INDUSTRIES17 citations84
US7279048B2Oct 9, 2007
Semiconductor manufacturing apparatus
SUMITOMO ELECTRIC INDUSTRIES8 citations73
US6599034B2Jul 29, 2003
Sealed airtight container for optical-semiconductors and optical-semiconductors module
SUMITOMO ELECTRIC INDUSTRIES8 citations73
US6653604B2Nov 25, 2003
Heater member for mounting heating object and substrate processing apparatus using the same
SUMITOMO ELECTRIC INDUSTRIES3 citations62
US12033880B2Jul 9, 2024
Wafer holding body
SUMITOMO ELECTRIC INDUSTRIES0 citations60
US10886157B2Jan 5, 2021
Wafer holding unit
SUMITOMO ELECTRIC INDUSTRIES1 citations60
US7342204B2Mar 11, 2008
Heater and heating device
SUMITOMO ELECTRIC INDUSTRIES1 citations51
US7306858B2Dec 11, 2007
Aluminum nitride sintered body
SUMITOMO ELECTRIC INDUSTRIES0 citations51