Inventor
BERNHARDT FRANK
DE8 patents
⚠️ This page may combine multiple inventors who share the name “BERNHARDT FRANK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LEICA MICROSYSTEMS
4 patentsUS7028565B2Apr 18, 2006
Method and arrangement for transporting and inspecting semiconductor substrates
LEICA MICROSYSTEMS6 citations71
US6553850B2Apr 29, 2003
Method and arrangement for transporting and inspecting semiconductor substrates
LEICA MICROSYSTEMS1 citations60
US6845174B2Jan 18, 2005
Arrangement and method for the identification of substrates
LEICA MICROSYSTEMS4 citations57
US6789436B2Sep 14, 2004
Method and arrangement for transporting and inspecting semiconductor substrates
LEICA MICROSYSTEMS0 citations49