Inventor

TINER ROBIN L

US57 patents

⚠️ This page may combine multiple inventors who share the name “TINER ROBIN L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

29 patents

USD784276SApr 18, 2017

Susceptor assembly

APPLIED MATERIALS INC333 citations99

US6746198B2Jun 8, 2004

Substrate transfer shuttle

APPLIED MATERIALS INC42 citations93

US7429410B2Sep 30, 2008

Diffuser gravity support

APPLIED MATERIALS INC32 citations91

US10262837B2Apr 16, 2019

Plasma uniformity control by gas diffuser hole design

APPLIED MATERIALS INC5 citations84

USD675172SJan 29, 2013

Substrate support

APPLIED MATERIALS INC8 citations84

USD640715SJun 28, 2011

Lift pin assembly

APPLIED MATERIALS INC8 citations84

USD635597SApr 5, 2011

Lift pin

APPLIED MATERIALS INC7 citations84

US7534301B2May 19, 2009

RF grounding of cathode in process chamber

APPLIED MATERIALS INC17 citations84

US9677177B2Jun 13, 2017

Substrate support with quadrants

APPLIED MATERIALS INC6 citations82

US10487401B2Nov 26, 2019

Diffuser temperature control

APPLIED MATERIALS INC4 citations73

US10312058B2Jun 4, 2019

Plasma uniformity control by gas diffuser hole design

APPLIED MATERIALS INC3 citations73

US10087524B2Oct 2, 2018

Showerhead support structure for improved gas flow

APPLIED MATERIALS INC5 citations73

US8381677B2Feb 26, 2013

Prevention of film deposition on PECVD process chamber wall

APPLIED MATERIALS INC6 citations73

US8365682B2Feb 5, 2013

Methods and apparatus for supporting substrates

APPLIED MATERIALS INC5 citations73

US10123379B2Nov 6, 2018

Substrate support with quadrants

APPLIED MATERIALS INC2 citations71

US10883174B2Jan 5, 2021

Gas diffuser mounting plate for reduced particle generation

APPLIED MATERIALS INC2 citations69

US9187827B2Nov 17, 2015

Substrate support with ceramic insulation

APPLIED MATERIALS INC2 citations63

USD717113SNov 11, 2014

Susceptor with heater

APPLIED MATERIALS INC3 citations63

USD716098SOct 28, 2014

Susceptor with heater

APPLIED MATERIALS INC3 citations63

USD608743SJan 26, 2010

Shadow frame

APPLIED MATERIALS INC3 citations63

USD608742SJan 26, 2010

Shadow frame

APPLIED MATERIALS INC3 citations63

USD627625SNov 23, 2010

Shadow frame support

APPLIED MATERIALS INC3 citations62

US11123837B2Sep 21, 2021

Method of removal of sharp corners from diffuser plate

APPLIED MATERIALS INC0 citations61

US10927461B2Feb 23, 2021

Gas diffuser support structure for reduced particle generation

APPLIED MATERIALS INC0 citations61

US11773489B2Oct 3, 2023

Gas confiner assembly for eliminating shadow frame

APPLIED MATERIALS INC0 citations52

US10697063B2Jun 30, 2020

Corner spoiler for improving profile uniformity

APPLIED MATERIALS INC0 citations52

US10280510B2May 7, 2019

Substrate support assembly with non-uniform gas flow clearance

APPLIED MATERIALS INC0 citations52

US12140168B2Nov 12, 2024

Flat head units for heavy load alignment

APPLIED MATERIALS INC0 citations51

US10923327B2Feb 16, 2021

Chamber liner

APPLIED MATERIALS INC0 citations51

CHOI SOO YOUNG

5 patents

US8074599B2Dec 13, 2011

Plasma uniformity control by gas diffuser curvature

CHOI SOO YOUNG253 citations99

US8083853B2Dec 27, 2011

Plasma uniformity control by gas diffuser hole design

CHOI SOO YOUNG753 citations98

US9382621B2Jul 5, 2016

Ground return for plasma processes

CHOI SOO YOUNG27 citations93

US9200368B2Dec 1, 2015

Plasma uniformity control by gas diffuser hole design

CHOI SOO YOUNG6 citations84

US9758869B2Sep 12, 2017

Anodized showerhead

CHOI SOO YOUNG4 citations73

TINER ROBIN L

5 patents

US8721791B2May 13, 2014

Showerhead support structure for improved gas flow

TINER ROBIN L516 citations98

USD701329SMar 18, 2014

Substrate support

TINER ROBIN L21 citations92

USD685335SJul 2, 2013

Substrate support

TINER ROBIN L6 citations84

USD650818SDec 20, 2011

Inner lift pin

TINER ROBIN L7 citations84

US8281739B2Oct 9, 2012

RF shutter

TINER ROBIN L5 citations61

APPLIED KOMATSU TECHNOLOGY INC

2 patents

US6517303B1Feb 11, 2003

Substrate transfer shuttle

APPLIED KOMATSU TECHNOLOGY INC79 citations98

US6213704B1Apr 10, 2001

Method and apparatus for substrate transfer and processing

APPLIED KOMATSU TECHNOLOGY INC144 citations98

ANWAR SUHAIL

2 patents

USD680946SApr 30, 2013

Gas flow diffuser faceplate

ANWAR SUHAIL11 citations81

USD669032SOct 16, 2012

Flow blocking shadow frame support

ANWAR SUHAIL4 citations60

WHITE JOHN M

2 patents

US8733279B2May 27, 2014

PECVD process chamber backing plate reinforcement

WHITE JOHN M4 citations73

US9580804B2Feb 28, 2017

Diffuser support

WHITE JOHN M3 citations67

SORENSEN CARL A

1 patent

US8992723B2Mar 31, 2015

RF bus and RF return bus for plasma chamber electrode

SORENSEN CARL A157 citations97

WANG QUNHUA

1 patent

USD664249SJul 24, 2012

Flow blocker plate

WANG QUNHUA21 citations91

KELLER ERNST

1 patent

US8075690B2Dec 13, 2011

Diffuser gravity support

KELLER ERNST24 citations91

FURUTA GAKU

1 patent

USD713200SSep 16, 2014

Susceptor with heater

FURUTA GAKU5 citations72

KIM SAM H

1 patent

US8853098B2Oct 7, 2014

Substrate support with gas introduction openings

KIM SAM H2 citations61

Showing the top 50 of 57 patents by PatentIndex Score.