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Inventor
LU WILLIAM M
US
3 patents
⚠️ This page may combine multiple inventors who share the name “LU WILLIAM M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
2 patents
US11810766B2
Nov 7, 2023
Protection of aluminum process chamber components
APPLIED MATERIALS INC
0 citations
57
US11072852B2
Jul 27, 2021
Pre-conditioned chamber components
APPLIED MATERIALS INC
0 citations
49
BOYD JR WENDELL G
1 patent
US9001489B2
Apr 7, 2015
Electrostatic chuck AlN dielectric repair
BOYD JR WENDELL G
7 citations
70