Inventor

EISNER EDWARD C

US19 patents

⚠️ This page may combine multiple inventors who share the name “EISNER EDWARD C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EISNER EDWARD C

AXCELIS TECH INC

Systems and methods for beam angle adjustment in ion implanters

Systems and methods for beam angle adjustment in ion implanters

System for magnetic scanning and correction of an ion beam

Ion beam scanning control methods and systems for ion implantation uniformity

Methods for rapidly switching off an ion beam

Ion implantation system having beam angle control in drift and deceleration modes

Combined electrostatic lens system for ion implantation

Beam profiling speed enhancement for scanned beam implanters

Ion implantation with diminished scanning field effects

Throughput enhancement for scanned beam ion implanters

Ion implanter with ionization chamber electrode design

Method and apparatus for improved uniformity control with dynamic beam shaping

System and method of controlling broad beam uniformity

Uniformity of a scanned ion beam

Combined multipole magnet and dipole scanning magnet

EISNER EDWARD C

System and method for ion implantation with improved productivity and uniformity

Beam line design to reduce energy contamination

Method and apparatus for improved uniformity control with dynamic beam shaping

GRAF MICHAEL A

Methods for beam current modulation by ion source parameter modulation