Inventor

FEDERICI RUDY

CH5 patents

⚠️ This page may combine multiple inventors who share the name “FEDERICI RUDY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BROOKS AUTOMATION INC

3 patents

US7047984B2May 23, 2006

Device and method for cleaning articles used in the production of semiconductor components

BROOKS AUTOMATION INC29 citations89

US7699573B2Apr 20, 2010

Reticle manipulating device

BROOKS AUTOMATION INC11 citations79

US7478454B2Jan 20, 2009

Manipulating device for photomasks that provides possibilities for cleaning and inspection of photomasks

BROOKS AUTOMATION INC0 citations39

TEC SEM AG

1 patent

US7682455B2Mar 23, 2010

Device for storing and/or transporting plate-shaped substrates in the manufacture of electronic components

TEC SEM AG5 citations59

BLATTNER JAKOB

1 patent

US8425172B2Apr 23, 2013

Reticle manipulation device

BLATTNER JAKOB4 citations52