Inventor
MURAKAMI TAKAHIRO
JP41 patents
⚠️ This page may combine multiple inventors who share the name “MURAKAMI TAKAHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
9 patentsUS7648782B2Jan 19, 2010
Ceramic coating member for semiconductor processing apparatus
TOKYO ELECTRON LTD33 citations92
US7416635B2Aug 26, 2008
Gas supply member and plasma processing apparatus
TOKYO ELECTRON LTD28 citations92
US7927066B2Apr 19, 2011
Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component
TOKYO ELECTRON LTD8 citations82
US7837432B2Nov 23, 2010
Exhaust system and exhausting pump connected to a processing chamber of a substrate processing apparatus
TOKYO ELECTRON LTD5 citations74
US12315709B2May 27, 2025
Method of performing maintenance on substrate processing apparatus
TOKYO ELECTRON LTD0 citations61
US8038837B2Oct 18, 2011
Ring-shaped component for use in a plasma processing, plasma processing apparatus and outer ring-shaped member
TOKYO ELECTRON LTD1 citations52
US11631590B2Apr 18, 2023
Substrate processing method, substrate processing apparatus and cleaning apparatus
TOKYO ELECTRON LTD0 citations48
US10867777B2Dec 15, 2020
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations47
US10784088B2Sep 22, 2020
Plasma processing method
TOKYO ELECTRON LTD0 citations34
MURAKAMI TAKAHIRO
6 patentsUS9337003B2May 10, 2016
Plasma processing apparatus and constituent part thereof
MURAKAMI TAKAHIRO3 citations69
US8685122B2Apr 1, 2014
Fuel gasification equipment
MURAKAMI TAKAHIRO4 citations65
US8072420B2Dec 6, 2011
Input device equipped with illumination mechanism
MURAKAMI TAKAHIRO4 citations62
US8414735B2Apr 9, 2013
Ring-shaped component for use in a plasma processing, plasma processing apparatus and outer ring-shaped member
MURAKAMI TAKAHIRO1 citations51
US8134134B2Mar 13, 2012
Particle attachment preventing method and substrate processing apparatus
MURAKAMI TAKAHIRO0 citations51
US8257453B2Sep 4, 2012
Method and device for gasifying gasification fuel
MURAKAMI TAKAHIRO0 citations39
ALPS ELECTRIC CO LTD
5 patentsUS6455795B1Sep 24, 2002
Key switch improved in feel of actuation and return speed during operation by finger
ALPS ELECTRIC CO LTD30 citations92
USD386488SNov 18, 1997
Data entry keyboard
ALPS ELECTRIC CO LTD6 citations71
US9176619B2Nov 3, 2015
Input device
ALPS ELECTRIC CO LTD3 citations62
US5326951AJul 5, 1994
Push button switch
ALPS ELECTRIC CO LTD0 citations52
US9472355B2Oct 18, 2016
Oscillator-type switch
ALPS ELECTRIC CO LTD0 citations41
IBM
3 patentsIHI CORP
3 patentsNEC BIGLOBE LTD
2 patentsHONDA MOTOR CO LTD
2 patentsNIPPON TUNGSTEN
2 patentsUS11548827B2Jan 10, 2023
Member for plasma processing apparatus and plasma processing apparatus with the same
NIPPON TUNGSTEN0 citations62
US11434174B2Sep 6, 2022
Member for plasma processing apparatus, plasma processing apparatus with the same and method for using sintered body
NIPPON TUNGSTEN1 citations62