Inventor
BRULS RICHARD JOSEPH
NL34 patents
⚠️ This page may combine multiple inventors who share the name “BRULS RICHARD JOSEPH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
22 patentsUS7528929B2May 5, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV46 citations95
US9134622B2Sep 15, 2015
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV9 citations92
US10345712B2Jul 9, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations84
US9952515B2Apr 24, 2018
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations84
US9134623B2Sep 15, 2015
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV8 citations84
US7534552B2May 19, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV11 citations83
US10558129B2Feb 11, 2020
Mask assembly
ASML NETHERLANDS BV7 citations82
US10241418B2Mar 26, 2019
Method and apparatus for obtaining diagnostic information relating to a lithographic manufacturing process, lithographic processing system including diagnostic apparatus
ASML NETHERLANDS BV9 citations80
US10222701B2Mar 5, 2019
Radiation source, lithographic apparatus device manufacturing method, sensor system and sensing method
ASML NETHERLANDS BV11 citations78
US7379154B2May 27, 2008
Lithographic apparatus, device manufacturing methods, mask and method of characterizing a mask and/or pellicle
ASML NETHERLANDS BV9 citations77
US7199863B2Apr 3, 2007
Method of imaging using lithographic projection apparatus
ASML NETHERLANDS BV10 citations76
US7817247B2Oct 19, 2010
Lithographic apparatus, excimer laser and device manufacturing method
ASML NETHERLANDS BV5 citations71
US7239370B2Jul 3, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV8 citations71
US10613445B2Apr 7, 2020
Methods and apparatus for obtaining diagnostic information relating to a lithographic manufacturing process
ASML NETHERLANDS BV3 citations69
US7595863B2Sep 29, 2009
Lithographic apparatus, excimer laser and device manufacturing method
ASML NETHERLANDS BV5 citations69
US11333984B2May 17, 2022
Apparatus for and method of in-situ particle removal in a lithography apparatus
ASML NETHERLANDS BV4 citations68
US11009803B2May 18, 2021
Mask assembly
ASML NETHERLANDS BV0 citations60
US7843552B2Nov 30, 2010
Lithographic apparatus, device manufacturing method, and mask having a pellicle attached hereto
ASML NETHERLANDS BV5 citations60
US10429741B2Oct 1, 2019
Lithographic apparatus and a method of operating the apparatus
ASML NETHERLANDS BV0 citations50
US10151984B2Dec 11, 2018
Lithographic apparatus and a method of operating the apparatus
ASML NETHERLANDS BV0 citations50
US9740113B2Aug 22, 2017
Lithographic apparatus, device manufacturing method and method of clamping an object
ASML NETHERLANDS BV0 citations48
US11137694B2Oct 5, 2021
Particle suppression systems and methods
ASML NETHERLANDS BV0 citations47
STREEFKERK BOB
2 patentsASML HOLDING NV
2 patentsUS7136152B2Nov 14, 2006
Method for bonding a pellicle to a patterning device and patterning device comprising a pellicle
ASML HOLDING NV2 citations61
US12332570B2Jun 17, 2025
Lithographic system provided with a deflection apparatus for changing a trajectory of particulate debris
ASML HOLDING NV0 citations54
BRUIJSTENS JEROEN PETER JOHANNES
2 patentsUS8730447B2May 20, 2014
Lithographic apparatus and method of operating the apparatus with a humid gas space between a projection system and a liquid confinement structure
BRUIJSTENS JEROEN PETER JOHANNES3 citations59
US9176371B2Nov 3, 2015
Immersion lithographic apparatus with a barrier between a projection system and a liquid confinement structure
BRUIJSTENS JEROEN PETER JOHANNES2 citations58