Inventor
CICILIA ORLANDO SERAPIO
NL2 patents
Patents
2 patentsUS7379154B2May 27, 2008
Lithographic apparatus, device manufacturing methods, mask and method of characterizing a mask and/or pellicle
ASML NETHERLANDS BV9 citations77
US7843552B2Nov 30, 2010
Lithographic apparatus, device manufacturing method, and mask having a pellicle attached hereto
ASML NETHERLANDS BV5 citations60