Inventor
GILL JUNE-ING
KR2 patents
Patents
2 patentsUS6960265B2Nov 1, 2005
Apparatus and method for collecting metallic impurity on a semiconductor wafer
SAMSUNG ELECTRONICS CO LTD10 citations68
US7081182B2Jul 25, 2006
Method and apparatus for automatically measuring the concentration of TOC in a fluid used in a semiconductor manufacturing process
SAMSUNG ELECTRONICS CO LTD5 citations58