Inventor
BROTSACK MARKUS
DE9 patents
⚠️ This page may combine multiple inventors who share the name “BROTSACK MARKUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT AG
7 patentsUS7511886B2Mar 31, 2009
Optical beam transformation system and illumination system comprising an optical beam transformation system
ZEISS CARL SMT AG63 citations98
US7408616B2Aug 5, 2008
Microlithographic exposure method as well as a projection exposure system for carrying out the method
ZEISS CARL SMT AG70 citations97
US7460206B2Dec 2, 2008
Projection objective for immersion lithography
ZEISS CARL SMT AG71 citations95
US7847921B2Dec 7, 2010
Microlithographic exposure method as well as a projection exposure system for carrying out the method
ZEISS CARL SMT AG30 citations92
US7714983B2May 11, 2010
Illumination system for a microlithography projection exposure installation
ZEISS CARL SMT AG38 citations92
US7283209B2Oct 16, 2007
Illumination system for microlithography
ZEISS CARL SMT AG16 citations91
US7884922B2Feb 8, 2011
Illumination system for microlithography
ZEISS CARL SMT AG3 citations61