Inventor

ZENZINGER MARKUS

DE3 patents

⚠️ This page may combine multiple inventors who share the name “ZENZINGER MARKUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT AG

2 patents

US7408616B2Aug 5, 2008

Microlithographic exposure method as well as a projection exposure system for carrying out the method

ZEISS CARL SMT AG70 citations97

US7847921B2Dec 7, 2010

Microlithographic exposure method as well as a projection exposure system for carrying out the method

ZEISS CARL SMT AG30 citations92

GRUNER TORALF

1 patent

US8767181B2Jul 1, 2014

Microlithographic exposure method as well as a projection exposure system for carrying out the method

GRUNER TORALF0 citations49