Inventor

MOTODATE YOSHINOBU

JP2 patents

⚠️ This page may combine multiple inventors who share the name “MOTODATE YOSHINOBU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ABE YO

1 patent

US8423175B2Apr 16, 2013

Thermal processing apparatus, thermal processing method, and storage medium

ABE YO9 citations76

TOKYO ELECTRON LTD

1 patent

US8565911B2Oct 22, 2013

Thermal processing apparatus, thermal processing method, and storage medium

TOKYO ELECTRON LTD2 citations58