Inventor

SHIN SO-EUN

KR2 patents

Patents

2 patents

US10223494B2Mar 5, 2019

Semiconductor device manufacturing method and mask manufacturing method

SAMSUNG ELECTRONICS CO LTD6 citations65

US9709893B2Jul 18, 2017

Exposure method using electron beam and substrate manufacturing method using the same

SAMSUNG ELECTRONICS CO LTD0 citations35