Inventor

BARTHELEMY ALEXANDRE

FR2 patents

Patents

2 patents

US9835377B2Dec 5, 2017

Support device for a plurality of wafers for a vertical oven

SOITEC SILICON ON INSULATOR0 citations30

US9275893B2Mar 1, 2016

Method of detaching a layer

SOITEC SILICON ON INSULATOR0 citations24