Inventor

CHACIN JUAN

US6 patents

⚠️ This page may combine multiple inventors who share the name “CHACIN JUAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

4 patents

US6916744B2Jul 12, 2005

Method and apparatus for planarization of a material by growing a sacrificial film with customized thickness profile

APPLIED MATERIALS INC27 citations87

US8372203B2Feb 12, 2013

Apparatus temperature control and pattern compensation

APPLIED MATERIALS INC9 citations83

US7691204B2Apr 6, 2010

Film formation apparatus and methods including temperature and emissivity/pattern compensation

APPLIED MATERIALS INC13 citations83

US7700376B2Apr 20, 2010

Edge temperature compensation in thermal processing particularly useful for SOI wafers

APPLIED MATERIALS INC4 citations56

CHACIN JUAN

2 patents

US8852349B2Oct 7, 2014

Wafer processing hardware for epitaxial deposition with reduced auto-doping and backside defects

CHACIN JUAN12 citations80

US8735772B2May 27, 2014

Method and apparatus for improved laser scribing of opto-electric devices

CHACIN JUAN4 citations63