Inventor
ICHIHARA YUTAKA
JP41 patents
⚠️ This page may combine multiple inventors who share the name “ICHIHARA YUTAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
29 patentsUS6195213B1Feb 27, 2001
Projection exposure apparatus and method
NIKON CORP143 citations99
US5307207AApr 26, 1994
Illuminating optical apparatus
NIKON CORP148 citations99
US5253110AOct 12, 1993
Illumination optical arrangement
NIKON CORP172 citations99
US4851978AJul 25, 1989
Illumination device using a laser
NIKON CORP154 citations99
US5898501AApr 27, 1999
Apparatus and methods for measuring wavefront aberrations of a microlithography projection lens
NIKON CORP94 citations98
US5071240ADec 10, 1991
Reflecting optical imaging apparatus using spherical reflectors and producing an intermediate image
NIKON CORP133 citations98
US6456382B2Sep 24, 2002
Interferometer that measures aspherical surfaces
NIKON CORP69 citations96
US5793473AAug 11, 1998
Projection optical apparatus for projecting a mask pattern onto the surface of a target projection object and projection exposure apparatus using the same
NIKON CORP68 citations96
US5289312AFeb 22, 1994
Catadioptric reduction projection optical system
NIKON CORP94 citations96
US5220454AJun 15, 1993
Cata-dioptric reduction projection optical system
NIKON CORP72 citations96
US5563706AOct 8, 1996
Interferometric surface profiler with an alignment optical member
NIKON CORP65 citations94
US6522716B1Feb 18, 2003
Multilayer-film reflective mirrors, extreme UV microlithography apparatus comprising same, and microelectronic-device manufacturing methods utilizing same
NIKON CORP49 citations93
US6362926B1Mar 26, 2002
Projection exposure apparatus and method
NIKON CORP21 citations93
US6108140AAug 22, 2000
Catadioptric reduction projection optical system and method
NIKON CORP19 citations93
US5623473AApr 22, 1997
Method and apparatus for manufacturing a diffraction grating zone plate
NIKON CORP25 citations93
US5076695ADec 31, 1991
Interferometer
NIKON CORP31 citations93
US7843550B2Nov 30, 2010
Projection optical system inspecting method and inspection apparatus, and a projection optical system manufacturing method
NIKON CORP17 citations92
US5774240AJun 30, 1998
Exposure apparatus for reproducing a mask pattern onto a photo-sensitive surface of a substrate using holographic techniques
NIKON CORP29 citations92
US5528390AJun 18, 1996
Exposure apparatus for reproducing a mask pattern onto a photo-sensitive surface of a substrate using holographic techniques
NIKON CORP22 citations92
US5504596AApr 2, 1996
Exposure method and apparatus using holographic techniques
NIKON CORP29 citations92
US5198837AMar 30, 1993
Laser beam harmonics generator and light exposing device
NIKON CORP21 citations89
US6894763B2May 17, 2005
Exposure apparatus and methods utilizing plural mask and object stages movable in opposite directions, and methods of producing devices using the same
NIKON CORP15 citations83
US5712735AJan 27, 1998
Catadioptric reduction projection optical system
NIKON CORP12 citations82
US5844728ADec 1, 1998
Catadioptric reduction projection optical system
NIKON CORP4 citations74
US5251070AOct 5, 1993
Catadioptric reduction projection optical system
NIKON CORP18 citations74
US7868997B2Jan 11, 2011
Projection optical system inspecting method and inspection apparatus, and a projection optical system manufacturing method
NIKON CORP5 citations73
US5446556AAug 29, 1995
Video clock signal generator in an optical scanner in which a mask including a linear scale provides timing for controlling the amplitude of a vibrating mirror
NIKON CORP13 citations73
US6118596ASep 12, 2000
Catadioptric reduction projection optical system and method
NIKON CORP3 citations63
US6963408B2Nov 8, 2005
Method and apparatus for point diffraction interferometry
NIKON CORP5 citations59
NIPPON KOGAKU KK
8 patentsUS4456931AJun 26, 1984
Electronic camera
NIPPON KOGAKU KK241 citations98
US4420773ADec 13, 1983
Electronic photographic camera
NIPPON KOGAKU KK233 citations98
US4710026ADec 1, 1987
Position detection apparatus
NIPPON KOGAKU KK134 citations96
US4471382ASep 11, 1984
Data recording device for electronic camera
NIPPON KOGAKU KK28 citations92
US4775229AOct 4, 1988
Fresnel lens in a finder optical system
NIPPON KOGAKU KK24 citations81
US4253752AMar 3, 1981
Focus condition detecting device
NIPPON KOGAKU KK14 citations74
USRE36740EJun 20, 2000
Cata-dioptric reduction projection optical system
NIPPON KOGAKU KK5 citations63
US4632531ADec 30, 1986
Focusing screen
NIPPON KOGAKU KK1 citations45