Inventor

BECKNELL ALAN FREDERICK

US3 patents

⚠️ This page may combine multiple inventors who share the name “BECKNELL ALAN FREDERICK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AXCELIS TECH INC

1 patent

US6524936B2Feb 25, 2003

Process for removal of photoresist after post ion implantation

AXCELIS TECH INC37 citations90

MACDERMID INC

1 patent

US5981147ANov 9, 1999

Stable, ionomeric photoresist emulsion and process of preparation and use thereof

MACDERMID INC25 citations87

BECKNELL ALAN FREDERICK

1 patent

US8580076B2Nov 12, 2013

Plasma apparatus, gas distribution assembly for a plasma apparatus and processes therewith

BECKNELL ALAN FREDERICK15 citations76