Inventor

BUCKLEY THOMAS JAMES

US2 patents

⚠️ This page may combine multiple inventors who share the name “BUCKLEY THOMAS JAMES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BECKNELL ALAN FREDERICK

1 patent

US8580076B2Nov 12, 2013

Plasma apparatus, gas distribution assembly for a plasma apparatus and processes therewith

BECKNELL ALAN FREDERICK15 citations76

SRIVASTAVA ASEEM KUMAR

1 patent

US8268181B2Sep 18, 2012

Plasma ashing apparatus and endpoint detection process

SRIVASTAVA ASEEM KUMAR16 citations75