Inventor

SAKTHIVEL PALANIKUMARAN

US4 patents

⚠️ This page may combine multiple inventors who share the name “SAKTHIVEL PALANIKUMARAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

(unassigned)

1 patent

US6082374AJul 4, 2000

Fluorine assisted stripping and residue removal in sapphire downstream plasma asher

26 citations85

AXCELIS TECH INC

1 patent

US7381651B2Jun 3, 2008

Processes for monitoring the levels of oxygen and/or nitrogen species in a substantially oxygen and nitrogen-free plasma ashing process

AXCELIS TECH INC10 citations79

BECKNELL ALAN FREDERICK

1 patent

US8580076B2Nov 12, 2013

Plasma apparatus, gas distribution assembly for a plasma apparatus and processes therewith

BECKNELL ALAN FREDERICK15 citations76

SRIVASTAVA ASEEM KUMAR

1 patent

US8268181B2Sep 18, 2012

Plasma ashing apparatus and endpoint detection process

SRIVASTAVA ASEEM KUMAR16 citations75