Inventor
SRIVASTAVA ASEEM KUMAR
US8 patents
⚠️ This page may combine multiple inventors who share the name “SRIVASTAVA ASEEM KUMAR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AXCELIS TECH INC
3 patentsUS7037846B2May 2, 2006
Method and apparatus for micro-jet enabled, low energy ion generation and transport in plasma processing
AXCELIS TECH INC98 citations93
US6761796B2Jul 13, 2004
Method and apparatus for micro-jet enabled, low-energy ion generation transport in plasma processing
AXCELIS TECH INC75 citations93
US6796711B2Sep 28, 2004
Contact temperature probe and process
AXCELIS TECH INC15 citations80