Inventor

WALDFRIED CARLO

US33 patents

⚠️ This page may combine multiple inventors who share the name “WALDFRIED CARLO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

WALDFRIED CARLO

ENTEGRIS INC

Electrostatic chuck and method of making same

Metal body having magnesium fluoride region formed therefrom

Conductive polymeric layers for charge dissipation

Methods for applying a blanket polymer coating to a substrate

Surface coating for chamber components used in plasma systems

Coatings for enhancement of properties and performance of substrate articles and apparatus

Coatings for enhancement of properties and performance of substrate articles and apparatus

Electrostatic chuck with a charge dissipation structure

Chemical resistant multi-layer coatings applied by atomic layer deposition

Chemical resistant multi-layer coatings applied by atomic layer deposition

Electrostatic chuck prepared by additive manufacturing, and related methods and structures

Coatings for glass-shaping molds and molds comprising the same

Substrate with fluorinated yttrium coatings, and methods of preparing and using the substrates

Yttrium fluoride films and methods of preparing and using yttrium fluoride films

Wafer contact surface protrusion profile with improved particle performance

AXCELIS TECH INC

Ultraviolet curing processes for advanced low-k materials

Plasma curing of MSQ-based porous low-k film materials

Plasma ashing process

Ultraviolet assisted porogen removal and/or curing processes for forming porous low k dielectrics

Apparatus and process for treating dielectric materials

Ultraviolet assisted pore sealing of porous low k dielectric films

Fluorine-free plasma curing process for porous low-k materials

Ultraviolet assisted pore sealing of porous low k dielectric films

DOW CORNING

Plasma curing process for porous silica thin film

Plasma curing process for porous low-k materials

AXCELIS TECHNOLGOIES INC

Plasma ashing process

AXCELIS TECHNOLOGIES

Plasma ashing process

AXCELIS TECHNOLOGY INC

Plasma process for removing polymer and residues from substrates

BECKNELL ALAN FREDERICK

Plasma apparatus, gas distribution assembly for a plasma apparatus and processes therewith

UNIV NEBRASKA

High resolution charged particle-energy detecting, multiple sequential stage, compact, small diameter, retractable cylindrical mirror analyzer system, and method of use

INTEL CORP

Plasma ashing process for removing photoresist and residues during ferroelectric device fabrication

MOORE DARREN L

Processes for curing silicon based low-k dielectric materials

LAM RES CORP

Plasma mediated ashing processes that include formation of a protective layer before and/or during the plasma mediated ashing process