P

Inventor

YOKOGAWA TAKASHI

JP12 patents
⚠️ This page may combine multiple inventors who share the name “YOKOGAWA TAKASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI INT ELECTRIC INC

4 patents
US9472398B2Oct 18, 2016

Method of manufacturing semiconductor device and substrate processing apparatus

HITACHI INT ELECTRIC INC3 citations72
US9340873B2May 17, 2016

Semiconductor device manufacturing method and substrate processing apparatus

HITACHI INT ELECTRIC INC4 citations72
US9650715B2May 16, 2017

Method of forming metal-containing film

HITACHI INT ELECTRIC INC0 citations51
US9416446B2Aug 16, 2016

Semiconductor device manufacturing method and substrate processing apparatus

HITACHI INT ELECTRIC INC0 citations51

SAITO TATSUYUKI

2 patents
US8808455B2Aug 19, 2014

Substrate processing apparatus and method of manufacturing semiconductor device

SAITO TATSUYUKI14 citations83
US9466477B2Oct 11, 2016

Method of manufacturing semiconductor device, substrate processing apparatus, and semiconductor device

SAITO TATSUYUKI1 citations51

KAGA YUKINAO

2 patents
US8691708B2Apr 8, 2014

Method of manufacturing semiconductor device and substrate processing apparatus

KAGA YUKINAO4 citations70
US9045825B2Jun 2, 2015

Method of forming metal-containing film

KAGA YUKINAO3 citations60

YOKOGAWA TAKASHI

1 patent
US8652258B2Feb 18, 2014

Substrate treatment device

YOKOGAWA TAKASHI9 citations79

SAKAI MASANORI

1 patent
US9238257B2Jan 19, 2016

Method of manufacturing semiconductor device, cleaning method, and substrate processing apparatus

SAKAI MASANORI4 citations72

WANG JIE

1 patent
US8123858B2Feb 28, 2012

Manufacturing method of semiconductor device and substrate processing apparatus

WANG JIE3 citations62

INOKUCHI YASUHIRO

1 patent
US8466049B2Jun 18, 2013

Semiconductor device producing method with selective epitaxial growth

INOKUCHI YASUHIRO4 citations56