Inventor
ISHIDA KAZUSHI
JP12 patents
⚠️ This page may combine multiple inventors who share the name “ISHIDA KAZUSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUJITSU LTD
7 patentsUS4803316AFeb 7, 1989
Push button switch using dome spring and switch element thereof
FUJITSU LTD47 citations90
US6046459AApr 4, 2000
Method and system for charged particle beam exposure
FUJITSU LTD7 citations73
US5981118ANov 9, 1999
Method for charged particle beam exposure with fixed barycenter through balancing stage scan
FUJITSU LTD10 citations73
US5966200AOct 12, 1999
Charged particle beam exposure apparatus
FUJITSU LTD7 citations72
US5895924AApr 20, 1999
Charged particle beam exposure method and apparatus
FUJITSU LTD9 citations72
US5561299AOct 1, 1996
X-Y stage and charged particle beam exposure apparatus
FUJITSU LTD7 citations67
US5708276AJan 13, 1998
Electron-beam exposure device and a method of detecting a mark position for the device
FUJITSU LTD6 citations59