Inventor
BIRO DANIEL
DE10 patents
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FRAUNHOFER GES FORSCHUNG
2 patentsUS6705457B2Mar 16, 2004
Transport device and method of transporting to-be-processed elements through a high-temperature zone
FRAUNHOFER GES FORSCHUNG10 citations67
US10593552B2Mar 17, 2020
Method for doping semiconductor substrates by means of a co-diffusion process and doped semiconductor substrate produced by means of said method
FRAUNHOFER GES FORSCHUNG0 citations43