P

Inventor

MUSHA KAZUHIRO

JP8 patents
⚠️ This page may combine multiple inventors who share the name “MUSHA KAZUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ULVAC INC

5 patents
US8366375B2Feb 5, 2013

Rotation introduction mechanism, substrate transfer apparatus, and vacuum processing apparatus

ULVAC INC10 citations82
US11628565B2Apr 18, 2023

Substrate transport device and substrate transporting method

ULVAC INC0 citations61
US11559889B2Jan 24, 2023

Substrate transport device and substrate transporting method

ULVAC INC0 citations61
US8382421B2Feb 26, 2013

Transport apparatus

ULVAC INC4 citations58
US10612130B2Apr 7, 2020

Vacuum processing apparatus

ULVAC INC0 citations37

MINAMI HIROFUMI

1 patent
US8717737B2May 6, 2014

Substrate conveyance method and substrate conveyance system

MINAMI HIROFUMI0 citations45

MIYATA TAKAHIRO

1 patent
US8167417B2May 1, 2012

Discharge unit and discharge apparatus

MIYATA TAKAHIRO0 citations34

MUSHA KAZUHIRO

1 patent
US8840116B2Sep 23, 2014

Seal mechanism and treatment apparatus

MUSHA KAZUHIRO0 citations32