Inventor
MINAMI HIROFUMI
JP19 patents
⚠️ This page may combine multiple inventors who share the name “MINAMI HIROFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ULVAC INC
9 patentsUS7645112B2Jan 12, 2010
Transport apparatus, control method for the same, and vacuum processing system
ULVAC INC12 citations83
US7572093B2Aug 11, 2009
Transport apparatus, control method for the same, and vacuum processing system
ULVAC INC8 citations83
US6840732B2Jan 11, 2005
Transport apparatus and vacuum processing system using the same
ULVAC INC20 citations83
US8366375B2Feb 5, 2013
Rotation introduction mechanism, substrate transfer apparatus, and vacuum processing apparatus
ULVAC INC10 citations82
US11628565B2Apr 18, 2023
Substrate transport device and substrate transporting method
ULVAC INC0 citations61
US11559889B2Jan 24, 2023
Substrate transport device and substrate transporting method
ULVAC INC0 citations61
US7591625B2Sep 22, 2009
Carrying mechanism, a carrying device and a vacuum processing apparatus
ULVAC INC3 citations61
US8382421B2Feb 26, 2013
Transport apparatus
ULVAC INC4 citations58
US10612130B2Apr 7, 2020
Vacuum processing apparatus
ULVAC INC0 citations37