Inventor
KHAJORNRUNGRUANG PANART
JP4 patents
⚠️ This page may combine multiple inventors who share the name “KHAJORNRUNGRUANG PANART”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
3 patentsUS8932883B2Jan 13, 2015
Method of measuring surface properties of polishing pad
EBARA CORP9 citations82
US10478936B2Nov 19, 2019
Method and apparatus for measuring surface properties of polishing pad
EBARA CORP0 citations48
US10401285B2Sep 3, 2019
Apparatus for measuring surface properties of polishing pad
EBARA CORP0 citations40