Inventor
TURNER JEFFREY I
US7 patents
⚠️ This page may combine multiple inventors who share the name “TURNER JEFFREY I”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMITOOL INC
6 patentsUS6270647B1Aug 7, 2001
Electroplating system having auxiliary electrode exterior to main reactor chamber for contact cleaning operations
SEMITOOL INC134 citations97
US6099712AAug 8, 2000
Semiconductor plating bowl and method using anode shield
SEMITOOL INC83 citations95
US6921468B2Jul 26, 2005
Electroplating system having auxiliary electrode exterior to main reactor chamber for contact cleaning operations
SEMITOOL INC40 citations92
US6599412B1Jul 29, 2003
In-situ cleaning processes for semiconductor electroplating electrodes
SEMITOOL INC42 citations92
US6776892B1Aug 17, 2004
Semiconductor plating system workpiece support having workpiece engaging electrode with pre-conditioned contact face
SEMITOOL INC7 citations73
US6454926B1Sep 24, 2002
Semiconductor plating system workpiece support having workpiece-engaging electrode with submerged conductive current transfer areas
SEMITOOL INC10 citations73