Inventor
CHANG KENNETH
US12 patents
⚠️ This page may combine multiple inventors who share the name “CHANG KENNETH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
7 patentsUS5266446ANov 30, 1993
Method of making a multilayer thin film structure
IBM147 citations95
US4076575AFeb 28, 1978
Integrated fabrication method of forming connectors through insulative layers
IBM79 citations95
US4184909AJan 22, 1980
Method of forming thin film interconnection systems
IBM102 citations89
US4307179ADec 22, 1981
Planar metal interconnection system and process
IBM39 citations86
US4040891AAug 9, 1977
Etching process utilizing the same positive photoresist layer for two etching steps
IBM25 citations78
US5130229AJul 14, 1992
Multi layer thin film wiring process featuring self-alignment of vias
IBM15 citations72
US5219669AJun 15, 1993
Layer thin film wiring process featuring self-alignment of vias
IBM3 citations61